RF Matches & Power Supplies
AMU10H-1
High Power RF Products: 20W to 5kW RF (AMU10H-1)
Tara/Trazar automatic impedance matching networks are custom designed for the semiconductor, flat panel display, thin film media and analytical instrument market where precise and reliable operation is needed to ensure optimum yields and minimum downtime.
The popular Tara/Trazar Model AMU10H-1 converts the complex impedance of a plasma at 13.56 MHz and other frequencies to a 50-ohm resistive load for the generator. Accommodating a wide range of RF power (from 25W to 5,000W) and process conditions without additional procedures or adjustments make the AMU10H-1 the most flexible and economical choice utilizing primary 24V, DC power for a variety of applications.
Tara also offers its Assured Quality Product (AQP) Program for AIM Network service and repair.
- Maximum RF Power: 5kW subject to load impedance
- Network Input Impedance: 50 Ohms nominal (HN connector)
- Load Impedance and Network Efficiency: Smith Chart illustrating tuning range, network power handling capability and network efficiency available upon request
- Reflected Power: 1% max. of forward power for forward power between 20W and 5kW (13.56 MHz generator only)
- Primary AC Power: 120 + 10%, -15% RMS volts, 50-60 Hz, 1 Amp RMS max. connector, IEC 320
- Fuse: 1 Amp slow blow, 0.25 diameter x 1.25 in.
- User Interface: DA-15, 15-pin female sub-miniature D
- Outline Dimensions: 152.4 x 310.9 x 322.4 mm (6.00 x 12.24 x 12.69 inches) nominal
- Weight: 6.4 kg (14 pounds) nominal
- Cooling: Forced air
- Mounting Surface: 70 degrees C maximum
- Maximum Altitude: 1700 meters (5577 feet) Determines internal arcing voltage limits