Chamber Sub-Systems
RF Matches & Power Supplies
AIM Networks, RF Generators & E-Chuck Power Supplies
AIM NETWORKS
Tara’s licensed Trazar Automatic Match Units (AMU's) technology is known within the industry as Automatic Impedance Matching (AIM) networks. These custom network systems are designed for the semiconductor, flat panel display, thin film media and analytical instrument markets. These markets demand precise and reliable operation, under a wide variety of process conditions, to ensure optimum yields with a minimum of downtime. The AIM network's servo control system finds the correct tune condition for any load within its range. Total automatic tuning guarantees fast, efficient and accurate setup with no operator intervention required. The Tara/Trazar’s AMU's include the un-ionized process chamber (no-glow condition) in its matching range. This virtually ensures striking the plasma process without momentarily increasing RF power or otherwise modifying the process conditions.
Tara/Trazar's extremely compact AIM Networks are designed to be integrated into custom network configurations that meet the exact specifications of major semiconductor customers. The 13.56 MHz, 3-5kW AIM Networks are completely air-cooled, self-contained in a single module. Multiple units are easily networked for installations where the power must be split to drive two electrodes, or when more than one RF generator, possibly with different frequencies, is required.
RF PRODUCTS
AMU2-1
AMU10D-2
AMU20D-2
AMU10E-2
AMU20E-2
AMU10H-1
ELECTROSTATIC CHUCK CONTROLLERS
Tara offers a complete line of sophisticated Electrostatic Chuck Controllers for both the 200mm and the latest 300mm plasma based processes through our licensing agreement with Trazar. The Elite Model Series offers bipolar and monopolar clamping voltages which can offer positive and/or negative offset voltages. Tara/Trazar offers high voltage power supplies with integrated RF monitoring and control circuitry.
Example at right: Elite Model ECC3-1: ±1250V with -1000V & +500V offset
In addition, Tara/Trazar offers optional and customized RF filters and polarity reversal for wafer release.
Please Contact Tara for detailed specifications or information on either product line.