Chamber Sub-Systems
Pedestal Refurbishment
Design, Fabrication, Testing & Repair
High-performance pedestal solutions from a world leader in semiconductor chamber technologies.
TARA TECHNOLOGIES can also extend pedestal and heater table life. Our diagnostic and refurbishment services bring assemblies to performance conditions that equal or surpass the performance of new units. Incoming inspections, intermediate data, and final certification are systematically tracked and are available online to customers.
TARA TECHNOLOGIES onsite PVD and CVD deposition operations provide a distinctive understanding of process constraints and critical pedestal assembly characteristics. We have unique capabilities in designing and monitoring demanding test criteria in chamber environments that simulate Fab conditions.
The Tara Technologies Advantage:
- Comprehensive Test Programs
- System and Sub-system Performance
- Bakeout & Testing for Chamber Pedestal/Tables
- Base Pressure/Rate of Rise/Thermal Uniformity
- System Tests in Process Chambers that Simulate Fab Environments
- Complete Pedestal Diagnostic & Repair Programs
- Less Development Risk
- Services that Eliminate End-customer Validation
- Real-time Online Pedestal Data Tracking